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ADVANCED LITHOGRAPHY - SPIEIt Took Awhile For The Idea To Gain Traction. The Introduction Of Optical Proximity Corrections (OPC) Initiated The Next Major Era Of Lithography. The Traditional Path For Scaling By Using Shorter Wavelengths, Decreasing K1 And Increasing Numerical Aperture Has Given Way To The Current Era Of Optical Multiple Patterning 10th, 2024
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